ADVANCES IN TRANSMISSION ELECTRON-MICROSCOPE TECHNIQUES APPLIED TO DEVICE FAILURE ANALYSIS

被引：81

作者：

SHENG, TT

MARCUS, RB

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 03期

关键词：

D O I：

10.1149/1.2129742

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：737 / 743

页数：7

共 10 条

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[3]

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[6]

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[7] LASER-INDUCED REACTIONS OF PLATINUM AND OTHER METAL-FILMS WITH SILICON [J].

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APPLIED PHYSICS LETTERS, 1978, 33 (11) :918-920

[8] BIRDS BEAK CONFIGURATION AND ELIMINATION OF GATE OXIDE THINNING PRODUCED DURING SELECTIVE OXIDATION [J].

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[9]

SHENG TT, 1976, IEEE T ELECTRON DEV, V23, P531, DOI 10.1109/T-ED.1976.18447

[10]

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