SILICON CRYSTALLITE FORMATION IN ION-IMPLANTED QUARTZ

被引：6

作者：

RAMABADRAN, UB ^{[1
]}

JACKSON, HE ^{[1
]}

FARLOW, GC ^{[1
]}

机构：

[1] WRIGHT STATE UNIV,DEPT PHYS,DAYTON,OH 45435

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 12期

关键词：

D O I：

10.1063/1.102463

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1199 / 1201

页数：3

共 9 条

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