OXIDATION OF POLYCRYSTALLINE INDIUM STUDIED BY X-RAY PHOTOELECTRON-SPECTROSCOPY AND STATIC SECONDARY ION MASS-SPECTROSCOPY

被引：132

作者：

HEWITT, RW ^{[1
]}

WINOGRAD, N ^{[1
]}

机构：

[1] PURDUE UNIV,DEPT CHEM,W LAFAYETTE,IN 47907

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.327991

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2620 / 2624

页数：5

共 29 条

[1] PHOTOEMISSION FROM INP-CS-O [J].

BELL, RL ;

UEBBING, JJ .

APPLIED PHYSICS LETTERS, 1968, 12 (03) :76-&

[2]

Benninghoven A., 1976, Critical Reviews in Solid State Sciences, V6, P291, DOI 10.1080/10408437608243561

[3] STRUCTURE OF INDIUM OXIDE TIN OXIDE TRANSPARENT CONDUCTING FILMS BY ELECTRON-DIFFRACTION AND ELECTRON SPECTROSCOPY [J].

BOSNELL, JR ;

WAGHORNE, R .

THIN SOLID FILMS, 1973, 15 (02) :141-148

[4]

Carlson T. A., 1972, Journal of Electron Spectroscopy and Related Phenomena, V1, P161, DOI 10.1016/0368-2048(72)80029-X

[5] PHOTOVOLTAGE STUDIES OF N-TYPE INP (100) [J].

DAHLBERG, SC .

SURFACE SCIENCE, 1976, 60 (01) :231-238

[6] OXYGEN-ADSORPTION ON MOLYBDENUM STUDIED BY LOW-ENERGY SECONDARY-ION MASS-SPECTROMETRY AND ELECTRON-INDUCED DESORPTION [J].

DAWSON, PH .

PHYSICAL REVIEW B, 1977, 15 (12) :5522-5534

[7] OXIDATION OF ALUMINUM STUDIED BY SIMS AT LOW ENERGIES [J].

DAWSON, PH .

SURFACE SCIENCE, 1976, 57 (01) :229-240

[8] ANALYSIS OF ULTRATHIN OXIDE GROWTH ON INDIUM [J].

ELDRIDGE, JM ;

VANDERME.YJ ;

DONG, DW .

THIN SOLID FILMS, 1972, 12 (02) :447-&

[9] SYSTEM FOR TRANSFERRING SAMPLES BETWEEN CHAMBERS IN UHV [J].

FLEISCH, T ;

SHEPARD, AT ;

RIDLEY, TY ;

VAUGHN, WE ;

WINOGRAD, N ;

BAITINGER, WE ;

OTT, GL ;

DELGASS, WN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05) :1756-1760

[10] CHEMISORPTION OF OXYGEN ON NI(100) BY SIMS AND XPS [J].

FLEISCH, T ;

WINOGRAD, N ;

DELGASS, WN .

SURFACE SCIENCE, 1978, 78 (01) :141-158

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