A NEW PROPOSAL FOR DESIGN OF HIGH-ACCURACY NANO-INDENTERS

被引：19

作者：

WOIRGARD, J

DARGENTON, JC

机构：

[1] Lab. de Metall. Phys. (URA 131 CNRS), Poitiers Univ., 86022 Poitiers Cedex

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1995年 / 6卷 / 01期

关键词：

D O I：

10.1088/0957-0233/6/1/004

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An apparatus is described that is suitable for mechanical characterization of thin films and metallic coatings at very low loads. In the present state, penetration depth can be measured, without special precautions, with a resolution of 1 angstrom. The loading electrostatic force can be varied from 10(-7) N to 0.1 N. The use of piezoelectric actuators allows one to position indentations with an accuracy in the range of a few nanometres. Owing to its compact design, the present apparatus appears highly insensitive to mechanical parasitic vibrations and to thermal instabilities.

引用

页码：16 / 21

页数：6

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