ANISOTROPIC LASER ETCHING OF OXIDIZED (100) SILICON

[1] ARIKADO T, 1984, MATER RES SOC S P, V29, P167

[2] ARNONE C, 1988, NATO ASI SER, V139, P241

[3] LASER-INDUCED ETCHING OF SI WITH CHLORINE [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (07) : 2321 - 2326

[4] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[5] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[6] LASER-ENHANCED CHEMICAL ETCHING OF SOLID-SURFACES [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1982, 26 (02) : 145 - 150

[7] LASER CHEMICAL TECHNIQUE FOR RAPID DIRECT WRITING OF SURFACE RELIEF IN SILICON [J]. APPLIED PHYSICS LETTERS, 1981, 38 (12) : 1018 - 1020

[8] TEMPERATURE PROFILES INDUCED BY A SCANNING CW LASER-BEAM [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) : 4364 - 4371

[9] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[10] 1923, LANDOLTBORNSTEIN, P893

[1] ARIKADO T, 1984, MATER RES SOC S P, V29, P167

[2] ARNONE C, 1988, NATO ASI SER, V139, P241

[3] LASER-INDUCED ETCHING OF SI WITH CHLORINE [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (07) : 2321 - 2326

[4] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[5] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[6] LASER-ENHANCED CHEMICAL ETCHING OF SOLID-SURFACES [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1982, 26 (02) : 145 - 150

[7] LASER CHEMICAL TECHNIQUE FOR RAPID DIRECT WRITING OF SURFACE RELIEF IN SILICON [J]. APPLIED PHYSICS LETTERS, 1981, 38 (12) : 1018 - 1020

[8] TEMPERATURE PROFILES INDUCED BY A SCANNING CW LASER-BEAM [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) : 4364 - 4371

[9] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[10] 1923, LANDOLTBORNSTEIN, P893