GRAIN-BOUNDARY SELF-DIFFUSION IN AU BY AR SPUTTERING TECHNIQUE

被引:70
作者
GUPTA, D [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.1661981
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:4455 / 4458
页数:4
相关论文
共 26 条
[11]   ANISOTROPY OF GRAIN BOUNDARY SELF-DIFFUSION [J].
HOFFMAN, RE .
ACTA METALLURGICA, 1956, 4 (01) :97-98
[12]   ELECTROMIGRATION IN THIN GOLD FILMS [J].
KLEIN, BJ .
JOURNAL OF PHYSICS F-METAL PHYSICS, 1973, 3 (04) :691-&
[13]   SELF-DIFFUSION IN GOLD [J].
MAKIN, SM ;
ROWE, AH ;
LECLAIRE, AD .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1957, 70 (06) :545-552
[14]  
MANNING JR, 1968, DIFFUSION KINETICS A
[15]   CORRELATION EFFECTS IN GRAIN-BOUNDARY DIFFUSION [J].
ROBINSON, JT ;
PETERSON, NL .
SURFACE SCIENCE, 1972, 31 (01) :586-&
[16]   VOID FORMATION AND GROWTH DURING ELECTROMIGRATION IN THIN FILMS [J].
ROSENBER.R ;
OHRING, M .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) :5671-&
[17]   GRAIN-BOUNDARY CONTRIBUTIONS TO TRANSPORT [J].
ROSENBERG, R ;
GUPTA, D ;
MAYADAS, AF .
SURFACE SCIENCE, 1972, 31 (01) :566-+
[18]   RESISTANCE MONITORING AND EFFECTS OF NONADHESION DURING ELECTROMIGRATION IN ALUMINUM FILMS [J].
ROSENBERG, R ;
BERENBAUM, L .
APPLIED PHYSICS LETTERS, 1968, 12 (05) :201-+
[19]  
ROSENBERG R, 1971, ATOMIC TRANSPORT SOL
[20]  
ROUIS J, 1972, CR ACAD SCI B, V274, P877