LITHOGRAPHIC MOLDING - A CONVENIENT ROUTE TO STRUCTURES WITH SUBMICROMETER DIMENSIONS

被引：86

作者：

WILBUR, JL ^{[1
]}

KIM, E ^{[1
]}

XIA, YN ^{[1
]}

WHITESIDES, GM ^{[1
]}

机构：

[1] HARVARD UNIV, DEPT CHEM, CAMBRIDGE, MA 02138 USA

来源：

ADVANCED MATERIALS | 1995年 / 7卷 / 07期

关键词：

D O I：

10.1002/adma.19950070710

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Communication: Elastomeric stamps with submicrometer features for use in the recently reported microcontact printing procedure are produced without the need for routine access to cleanrooms. The new technique is therefore an alternative to the use of photolithography for the fabrication of the stamps, simplifying the technology required to generate structures with sub-micrometer dimensions (e.g. see Fig.).

引用

收藏

页码：649 / 652

页数：4

相关论文

共 24 条

[1] MANIPULATION OF THE WETTABILITY OF SURFACES ON THE 0.1-MICROMETER TO 1-MICROMETER SCALE THROUGH MICROMACHINING AND MOLECULAR SELF-ASSEMBLY [J].

ABBOTT, NL ;

FOLKERS, JP ;

WHITESIDES, GM .

SCIENCE, 1992, 257 (5075) :1380-1382

[2] FABRICATION OF HIGH PRECISION NOZZLES BY ANISOTROPIC ETCHING OF (100) SILICON [J].

BASSOUS, E ;

BARAN, EF .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) :1321-1327

[3] SELF-ORGANIZATION OF ORGANIC LIQUIDS ON PATTERNED SELF-ASSEMBLED MONOLAYERS OF ALKANETHIOLATES ON GOLD [J].

BIEBUYCK, HA ;

WHITESIDES, GM .

LANGMUIR, 1994, 10 (08) :2790-2793

[4] AUTOPHOBIC PINNING OF DROPS OF ALKANETHIOLS ON GOLD [J].

BIEBUYCK, HA ;

WHITESIDES, GM .

LANGMUIR, 1994, 10 (12) :4581-4587

[5] DEEP UV PHOTOCHEMISTRY AND PATTERNING OF SELF-ASSEMBLED MONOLAYER FILMS [J].

CALVERT, JM ;

GEORGER, JH ;

PECKERAR, MC ;

PEHRSSON, PE ;

SCHNUR, JM ;

SCHOEN, PE .

THIN SOLID FILMS, 1992, 210 (1-2) :359-363

[6] DIRECT MEASUREMENT OF INTERFACIAL INTERACTIONS BETWEEN SEMISPHERICAL LENSES AND FLAT SHEETS OF POLY(DIMETHYLSILOXANE) AND THEIR CHEMICAL DERIVATIVES [J].

CHAUDHURY, MK ;

WHITESIDES, GM .

LANGMUIR, 1991, 7 (05) :1013-1025

[7] CORRELATION BETWEEN SURFACE FREE-ENERGY AND SURFACE CONSTITUTION [J].

CHAUDHURY, MK ;

WHITESIDES, GM .

SCIENCE, 1992, 255 (5049) :1230-1232

[8] DEEP UV PHOTOCHEMISTRY OF CHEMISORBED MONOLAYERS - PATTERNED COPLANAR MOLECULAR ASSEMBLIES [J].

DULCEY, CS ;

GEORGER, JH ;

KRAUTHAMER, V ;

STENGER, DA ;

FARE, TL ;

CALVERT, JM .

SCIENCE, 1991, 252 (5005) :551-554

[9] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON [J].

FINNE, RM ;

KLEIN, DL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) :965-&

[10] PHOTOPATTERNING OF SELF-ASSEMBLED ALKANETHIOLATE MONOLAYERS ON GOLD - A SIMPLE MONOLAYER PHOTORESIST UTILIZING AQUEOUS CHEMISTRY [J].

HUANG, JY ;

DAHLGREN, DA ;

HEMMINGER, JC .

LANGMUIR, 1994, 10 (03) :626-628