TRANSMISSION ELECTRON-MICROSCOPY OBSERVATIONS OF LOW-TEMPERATURE ION-IMPLANTED (100) SILICON

被引：11

作者：

SERVIDORI, M

VECCHI, I

机构：

来源：

SOLID-STATE ELECTRONICS | 1981年 / 24卷 / 04期

关键词：

D O I：

10.1016/0038-1101(81)90026-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：329 / 331

页数：3

共 13 条

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