A SPECTROSCOPIC ELLIPSOMETRY STUDY OF THE GROWTH AND MICROSTRUCTURE OF GLOW-DISCHARGE AMORPHOUS AND MICROCRYSTALLINE SILICON FILMS

被引：17

作者：

KUMAR, S

PANDYA, DK

CHOPRA, KL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 05期

关键词：

D O I：

10.1063/1.339932

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1497 / 1503

页数：7

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