COSPUTTERED FILMS OF MIXED TIO2/SIO2

被引：18

作者：

LAIRD, R ^{[1
]}

BELKIND, A ^{[1
]}

机构：

[1] BOC GRP INC,CTR TECH,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 04期

关键词：

D O I：

10.1116/1.578114

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A series of experiments to develop thin films composed of mixed oxides by reactive cosputtering from two different C-MAG (C-MAG is Reg. U.S. Pat & Tm. Off) cathodes (titanium, silicon) is discussed. The depositions were produced in a production scale coating machine capable of coating substrates of one meter square and larger. The optical, mechanical, structural, and chemical properties are also presented in this paper.

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页码：1908 / 1912

页数：5

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