THE EFFECT OF ELECTRODE AREA RATIO ON LOW-FREQUENCY GLOW-DISCHARGES

被引：23

作者：

GOTTSCHO, RA

SCHELLER, GR

STONEBACK, D

INTRATOR, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343564

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：492 / 500

页数：9

共 52 条

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