THE EFFECT OF ELECTRODE AREA RATIO ON LOW-FREQUENCY GLOW-DISCHARGES

被引：23

作者：

GOTTSCHO, RA

SCHELLER, GR

STONEBACK, D

INTRATOR, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343564

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：492 / 500

页数：9

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ZAROWIN, CB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (04) :1537-1549

[52] PLASMA ETCH ANISOTROPY - THEORY AND SOME VERIFYING EXPERIMENTS RELATING ION-TRANSPORT, ION ENERGY, AND ETCH PROFILES [J].

ZAROWIN, CB .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (05) :1144-1152

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