MULTIPLE SUBSTRATE-MASK-SOURCE THIN-FILM DEPOSITION SYSTEM

被引：1

作者：

KAZMERSK.LL ^{[1
]}

MORGAN, GK ^{[1
]}

PEDERSEN, AP ^{[1
]}

机构：

[1] UNIV MAINE,DEPT ELECT ENGN,ORONO,ME 04473

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1973年 / 44卷 / 11期

关键词：

D O I：

10.1063/1.1686024

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1658 / 1660

页数：3

相关论文

共 4 条

[1] MODULAR THIN FILM DEPOSITION SYSTEM
AMES, I
HOEKSTRA, J
FOLCHI, G
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (07) : 1049 - &
[2] SIMPLIFIED TECHNIQUE FOR USE IN MULTIPLE THIN-FILM DEPOSITION SYSTEMS
CHIRLIAN, PM
PHAIR, HW
MARSOCCI, VA
KRASZEWSKI, WV
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1964, 35 (12) : 1718 - +
[3] A MASKING JIG FOR MULTIPLE FILM DEPOSITION
NUNN, FA
CAMPBELL, DS
[J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1963, 40 (06): : 337 - &
[4] MECHANICAL SYSTEM FOR MULTIPLE THIN FILM DEPOSITION
RANDLETT, MR
STROBERG, EH
CHOPRA, KL
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (10) : 1378 - &