CHEMICAL-BOUNDARY LAYERS IN CVD .2. REVERSIBLE-REACTIONS

In addition to irreversible reactions, which were treated in part I, reversible reactions in the gas phase have been studied using the concept of the chemical boundary layer. The analysis is given for the situations in which either the forward or the back reaction is dominant. Two conceptual models for the boundary layer are used in the calculations: the block model and the linearly varying k model. It is shown that both models lead to the same deposition rates. © 1990, The Electrochemical Society, Inc. All rights reserved.