NOVEL TECHNIQUE FOR THE SEPARATION OF MECHANICAL-PROPERTIES AND INTRINSIC STRESS OF PRE-IRRADIATED AND POST-IRRADIATED MEMBRANES

被引：3

作者：

CHEN, HTH

ENGELSTAD, RL

CERRINA, F

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587413

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3975 / 3978

页数：4

共 9 条

[1] DYNAMICAL METHOD FOR THE THERMOMECHANICAL STUDY OF THIN MEMBRANES [J].

BERRY, BS ;

PRITCHET, WC ;

UZOH, CE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06) :1565-1569

[2]

Chen H. M., UNPUB

[3]

CHEN HTH, 1994, P SOC PHOTO-OPT INS, V2194, P240, DOI 10.1117/12.175810

[4] NOVEL X-RAY MASK DISTORTION MEASUREMENT TECHNIQUE EMPLOYING HOLOGRAPHIC GRATINGS AND PHASE-SHIFTING INTERFEROMETRY [J].

HANSEN, ME ;

CHEN, HTH ;

CHEN, G ;

ENGELSTAD, RL ;

CERRINA, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :2657-2661

[5] A STUDY OF RADIATION-DAMAGE IN SIN AND SIC MASK MEMBRANES [J].

ITOH, M ;

HORI, M ;

KOMANO, H ;

MORI, I .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3262-3265

[6] RADIATION-DAMAGE EFFECTS IN BORON-NITRIDE MASK MEMBRANES SUBJECTED TO X-RAY-EXPOSURES [J].

JOHNSON, WA ;

LEVY, RA ;

RESNICK, DJ ;

SAUNDERS, TE ;

YANOF, AW ;

BETZ, H ;

HUBER, H ;

OERTEL, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :257-261

[7]

SEESE PA, 1993, P SOC PHOTO-OPT INS, V1924, P457, DOI 10.1117/12.146527

[8]

WELLS GM, 1991, P SOC PHOTO-OPT INS, V1465, P124, DOI 10.1117/12.47349

[9]

YOUNG WC, 1989, FORMULAS STRESS STRA, P263

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