FRONT SURFACE CONTROL OF CR REDISTRIBUTION AND FORMATION OF STABLE CR DEPLETION CHANNELS IN GAAS

被引:10
作者
MAGEE, TJ
ORMOND, RD
EVANS, CA
BLATTNER, RJ
MALBON, RM
DAY, DS
SANKARAN, R
机构
[1] CHARLES EVANS & ASSOCIATES,SAN MATEO,CA 94402
[2] AVANTEK INC,SANTA CLARA,CA 95051
关键词
D O I
10.1063/1.92412
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:559 / 561
页数:3
相关论文
共 15 条
[1]  
ARTHUR JR, 1967, J PHYS CHEM SOLIDS, V28, P2261
[2]  
Asbeck P. M., 1980, IEEE Electron Device Letters, VEDL-1, P35, DOI 10.1109/EDL.1980.25221
[3]  
bern welch, 2018, COMMUNICATION
[4]   REDISTRIBUTION OF CR DURING ANNEALING OF SE-80-IMPLANTED GAAS [J].
EVANS, CA ;
DELINE, VR ;
SIGMON, TW ;
LIDOW, A .
APPLIED PHYSICS LETTERS, 1979, 35 (03) :291-293
[5]   IMPLANTATION OF SHALLOW IMPURITIES IN CR-DOPED SEMI-INSULATING GAAS [J].
FAVENNEC, PN ;
HARIDON, HL .
APPLIED PHYSICS LETTERS, 1979, 35 (09) :699-701
[6]   INCORPORATION OF BORON DURING THE GROWTH OF GAAS SINGLE-CRYSTALS [J].
HOPKINS, CG ;
DELINE, VR ;
BLATTNER, RJ ;
EVANS, CA ;
MAGEE, TJ .
APPLIED PHYSICS LETTERS, 1980, 36 (12) :989-990
[7]  
HUBER AM, 1979, APPL PHYS LETT, V34, P859
[8]   REDISTRIBUTION OF CR IN CAPLESS-ANNEALED GAAS UNDER ARSENIC PRESSURE [J].
KASAHARA, J ;
WATANABE, N .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (03) :L151-L154
[9]   ALLOYING OF AU LAYERS AND REDISTRIBUTION OF CR IN GAAS [J].
MAGEE, TJ ;
PENG, J ;
HONG, JD ;
DELINE, VR ;
EVANS, CA .
APPLIED PHYSICS LETTERS, 1979, 35 (08) :615-617
[10]   LOW-TEMPERATURE GETTERING OF CR IN GAAS [J].
MAGEE, TJ ;
HUNG, J ;
DELINE, VR ;
EVANS, CA .
APPLIED PHYSICS LETTERS, 1980, 37 (01) :53-55