DIFFERENT DIFFUSION BEHAVIOR OF COPPER IN EPITAXIAL AND IN BULK GAAS

被引:16
作者
HASEGAWA, F [1 ]
机构
[1] NIPPON ELECT CO LTD,CENT RES LABS,KAWASAKI,JAPAN
关键词
D O I
10.1063/1.1663526
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1944 / 1947
页数:4
相关论文
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