EFFECT OF THE OXYGEN ABSORPTION ON PROPERTIES OF ITO LAYERS

被引：35

作者：

BARDOS, L ^{[1
]}

LIBRA, M ^{[1
]}

机构：

[1] TESLA HOLESOVICE,CS-17004 PRAGUE 7,CZECHOSLOVAKIA

来源：

VACUUM | 1989年 / 39卷 / 01期

关键词：

D O I：

10.1016/0042-207X(89)90095-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：33 / 36

页数：4

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