HIGH-SPEED PIPE INNER COATING USING MAGNETRON HOLLOW-CATHODE DISCHARGE IN A MAGNETIC-FIELD

We developed a new plasma processing device for high speed coating of the inside of a metallic pipe to protect it against inner corrosion. The method on which the device is based is named the magnetron hollow-cathode discharge method. This method uses the magnetron effect and the hollow-cathode effect with a multicylindrical cathode at the same time. Both the magnetron effect and the hollow-cathode effect were useful for producing long narrow dense plasmas. Preliminary experimental results of a magnetron hollow-cathode discharge are described. An attempt to prepare titanium or TiC thin film on the inner surface of a metallic pipe was performed by this method.