PRODUCTION OF ION-BEAM USING PLASMA FILAMENT ION-SOURCE

被引：11

作者：

YABE, E ^{[1
]}

FUKUI, R ^{[1
]}

机构：

[1] ULVAC CORP,DIV RES & DEV,CHIGASAKI,KANAGAWA 253,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 07期

关键词：

D O I：

10.1143/JJAP.26.1179

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1179 / 1184

页数：6

共 8 条

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[6] PLASMA FILAMENT ION-SOURCE [J].

YABE, E ;

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[7] AN ION-SOURCE WITH PLASMA GENERATOR [J].

YABE, E ;

TAKESHIRO, S ;

SUNAKO, K ;

TAKAYAMA, K ;

FUKUI, R ;

TAKAGI, K ;

OKAMOTO, K ;

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :119-122

[8] ION-SOURCE WITH PLASMA CATHODE [J].

YABE, E .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (01) :1-5

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