PROPERTIES AND APPLICATIONS OF ION-IMPLANTED FILMS

被引:25
作者
STEPHENS, KG
WILSON, IH
机构
关键词
D O I
10.1016/0040-6090(78)90119-0
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:325 / 347
页数:23
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