RESONANT-CAVITY LIGHT-EMITTING DIODE AND DETECTOR USING EPITAXIAL LIFTOFF

被引:25
作者
CORBETT, B
CONSIDINE, L
WALSH, S
KELLY, WM
机构
[1] National Microelectronics Research Centre, University College, Cork
关键词
D O I
10.1109/68.257185
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Epitaxial liftoff (ELO) is used in a novel manner to form arrays of vertical resonant cavity light emitting diodes (RCLED's) using two metal mirrors. The epitaxial layers consist of an InP/InGaAs p-i-n structure. Electroluminescence from the vertically emitting resonant cavity is measured CW at room temperature to have a spectral width of 9 meV in contrast to a photoluminescence spectral width of 51 meV for the unprocessed layers. The structure behaves as a resonant detector under reverse bias. Cavities formed in this manner will find wide application in surface emitting and detecting arrays and spatial light modulators, and as a means of studying the physics of spontaneous emission.
引用
收藏
页码:1041 / 1043
页数:3
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