RECENT ADVANCES IN PHOTO-LUMINESCENCE ANALYSIS OF SI - APPLICATION TO AN EPITAXIAL LAYER AND NITROGEN IN SI

被引：16

作者：

TAJIMA, M

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来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1982年 / 21卷 / 01期

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D O I：

10.7567/JJAPS.21S1.113

中图分类号：

O59 [应用物理学];

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页码：113 / 119

页数：7

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