SPUTTERING OF POLYCRYSTALLINE COPPER + SILVER BY 30-170 KEV ARGON IONS

被引：27

作者：

RAMER, CE

REYNOLDS, HK

NARASIMHAM, MA

ALLRED, JC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1964年 / 35卷 / 06期

关键词：

D O I：

10.1063/1.1713718

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1673 / +

页数：1

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