ON THE MECHANISM OF HILLOCKS FORMATION IN VAPOR-DEPOSITED THIN-FILMS

被引：25

作者：

REICHA, FM

BARNA, PB

机构：

来源：

ACTA PHYSICA ACADEMIAE SCIENTIARUM HUNGARICAE | 1980年 / 49卷 / 1-3期

关键词：

D O I：

10.1007/BF03158754

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：237 / 251

页数：15

共 28 条

[1] NATURE OF STABLE OXIDE LAYER FORMED ON AN ALUMINUM SURFACE BY WORK FUNCTION MEASUREMENTS [J].

AGARWALA, VK ;

FORT, T .

SURFACE SCIENCE, 1976, 54 (01) :60-70

[2] FORMATION OF ALUMINUM THIN-FILMS IN THE PRESENCE OF OXYGEN AND NICKEL [J].

BARNA, A ;

BARNA, PB ;

RADNOCZI, G ;

REICHA, FM ;

TOTH, L .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 55 (02) :427-435

[3] STRUCTURAL ANOMALIES DISTURBING MEASUREMENT OF QUANTUM SIZE EFFECT [J].

BARNA, A ;

BARNA, PB ;

FEDOROWICH, R ;

RADNOCZI, G ;

SUGAWARA, H .

THIN SOLID FILMS, 1976, 36 (01) :75-79

[4]

BARNA A, 1968, J VAC SCI TECHNOL, V6, P472

[5] SURFACE CHEMICAL PHENOMENA INFLUENCING THE GROWTH OF THIN-FILMS [J].

BARNA, PB ;

BARNA, A ;

PAAL, Z .

ACTA PHYSICA ACADEMIAE SCIENTIARUM HUNGARICAE, 1980, 49 (1-3) :77-85

[6]

Chopra K.L, 1969, THIN FILM PHENOMENA

[7] MORPHOLOGY OF THICK EVAPORATED ALUMINUM FILMS AND THEIR PURITY AS DETERMINED BY PROTON-INDUCED X-RAY ANALYSIS [J].

DHERE, NG ;

ARSENIO, TP ;

PATNAIK, BK .

THIN SOLID FILMS, 1977, 44 (01) :29-42

[8] PURITY AND MORPHOLOGY OF ALUMINUM FILMS [J].

DHERE, NG ;

ARSENIO, TP ;

PATNAIK, BK .

THIN SOLID FILMS, 1975, 30 (02) :267-279

[9]

DHEURLE F, 1968, T METALL SOC AIME, V242, P502

[10] ALUMINUM FILMS DEPOSITED BY RF SPUTTERING [J].

DHEURLE, FM .

METALLURGICAL TRANSACTIONS, 1970, 1 (03) :725-&

← 1 2 3 →