X-RAY-IMAGING OF NANOSTRUCTURE PATTERNS

被引：12

作者：

VLADIMIRSKY, Y ^{[1
]}

KERN, D ^{[1
]}

MEYERILSE, W ^{[1
]}

ATTWOOD, D ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR X-RAY OPT,BERKELEY,CA 94720

来源：

关键词：

D O I：

10.1063/1.100990

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：286 / 288

页数：3

共 11 条

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[2] CEGLIO NM, 1981, LOW ENERGY XRAY DIAG, P210
[3] COANE PJ, 1982, 10TH P C EL ION BEAM
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[5] Lai B., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P174, DOI 10.1117/12.949666
[6] SCANNING-X-RAY MICROSCOPE WITH 75-NM RESOLUTION
RARBACK, H
SHU, D
FENG, SC
ADE, H
KIRZ, J
MCNULTY, I
KERN, DP
CHANG, THP
VLADIMIRSKY, Y
ISKANDER, N
ATTWOOD, D
MCQUAID, K
ROTHMAN, S
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (01) : 52 - 59
[7] RUDOLPH D, 1983, XRAY MICROSCOPY, P192
[8] DESIGN AND EXPERIMENTAL TECHNOLOGY FOR 0.1-MU-M GATE-LENGTH LOW-TEMPERATURE OPERATION FETS
SAIHALASZ, GA
WORDEMAN, MR
KERN, DP
GANIN, E
RISHTON, S
ZICHERMAN, DS
SCHMID, H
POLCARI, MR
NG, HY
RESTLE, PJ
CHANG, THP
DENNARD, RH
[J]. IEEE ELECTRON DEVICE LETTERS, 1987, 8 (10) : 463 - 466
[9] SCHMAHL G, 1983, XRAY MICROSCOPY, P63
[10] HIGH-RESOLUTION FRESNEL ZONE PLATES FOR SOFT X-RAYS
VLADIMIRSKY, Y
KERN, D
CHANG, THP
ATTWOOD, D
ADE, H
KIRZ, J
MCNULTY, I
RARBACK, H
SHU, D
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 311 - 315