X-RAY-IMAGING OF NANOSTRUCTURE PATTERNS

被引:12
作者
VLADIMIRSKY, Y [1 ]
KERN, D [1 ]
MEYERILSE, W [1 ]
ATTWOOD, D [1 ]
机构
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR X-RAY OPT,BERKELEY,CA 94720
关键词
D O I
10.1063/1.100990
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:286 / 288
页数:3
相关论文
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