GROWTH OF NIO AND SIO2 THIN-FILMS

被引：28

作者：

ATKINSON, A

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1987年 / 55卷 / 06期

关键词：

D O I：

10.1080/13642818708218370

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：637 / 650

页数：14

共 27 条

[1] A QUANTITATIVE DEMONSTRATION OF THE GRAIN-BOUNDARY DIFFUSION MECHANISM FOR THE OXIDATION OF METALS
ATKINSON, A
TAYLOR, RI
HUGHES, AE
[J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1982, 45 (05): : 823 - 833
[2] THE DIFFUSION OF NI-63 ALONG GRAIN-BOUNDARIES IN NICKEL-OXIDE
ATKINSON, A
TAYLOR, RI
[J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1981, 43 (04): : 979 - 998
[3] TRANSPORT PROCESSES DURING THE GROWTH OF OXIDE-FILMS AT ELEVATED-TEMPERATURE
ATKINSON, A
[J]. REVIEWS OF MODERN PHYSICS, 1985, 57 (02) : 437 - 470
[4] THE OXIDATION OF SILICON BY DRY OXYGEN - CAN WE DISTINGUISH BETWEEN MODELS
BLANC, J
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (06): : 685 - 710
[5] THEORY OF THE OXIDATION OF METALS
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MOTT, NF
[J]. REPORTS ON PROGRESS IN PHYSICS, 1948, 12 : 163 - 184
[6] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON
DEAL, BE
GROVE, AS
[J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) : 3770 - &
[7] SIO2 ULTRA THIN-FILM GROWTH-KINETICS AS INVESTIGATED BY SURFACE TECHNIQUES
DERRIEN, J
COMMANDRE, M
[J]. SURFACE SCIENCE, 1982, 118 (1-2) : 32 - 46
[8] METAL OXIDATION .1. IONIC TRANSPORT-EQUATION
DIGNAM, MJ
YOUNG, DJ
GOAD, DGW
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1973, 34 (07) : 1227 - 1234
[9] LOW-TEMPERATURE OXIDATION OF METALS AND SEMICONDUCTORS
FEHLNER, FP
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (07) : 1645 - 1652
[10] OXIDATION AT LOW-TEMPERATURES
FEHLNER, FP
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1985, 52 (03): : 729 - 738

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