THE ELECTRICAL-PROPERTIES OF POROUS SILICON PRODUCED FROM N(+) SILICON SUBSTRATES

被引:38
作者
SIMONS, AJ
COX, TI
UREN, MJ
CALCOTT, PDJ
机构
[1] Defence Research Agency, Great Malvern, Worcestershire WR14 3PS, St. Andrews Road
关键词
ELECTRICAL PROPERTIES AND MEASUREMENTS; HALL EFFECT; POROUS SILICON; SCHOTTKY BARRIER;
D O I
10.1016/0040-6090(94)05622-K
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Current transport through porous silicon (PS) films of 50% porosity fabricated from n-type (0.018 Omega cm) substrates has been studied. This has been achieved by comparing the current density J vs, voltage V characteristics for metal/PS/n(+)-Si/aluminium and metal/PS/aluminium devices. For the case of metal = aluminium, the J-V characteristics are ohmic. For metal = gold, the J-V characteristics are consistent with the formation of a rectifying Schottky barrier of height 0.74 eV at the Au/PS contact. As the Au/PS contact is forward biased for positive bias on the gold, this implies that the PS is n type in nature. This is confirmed by Hall effect measurements which give a carrier concentration and Hall mobility of 1.3 x 10(13) cm(-3) and 30 cm(2) V-1 s(-1) respectively. This carrier concentration is consistent with the pinning of the Fermi level at an energy which is approximately the same as that of the (-/O) level of P-b centres at an SiO2-Si interface.
引用
收藏
页码:12 / 15
页数:4
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