ABSOLUTE AND RANDOM ERROR ANALYSIS OF THE DYNAMIC IMAGING MICROELLIPSOMETRY TECHNIQUE

被引：10

作者：

COHN, RF ^{[1
]}

WAGNER, JW ^{[1
]}

机构：

[1] JOHNS HOPKINS UNIV,DEPT MAT SCI & ENGN,BALTIMORE,MD 21218

来源：

APPLIED OPTICS | 1989年 / 28卷 / 15期

关键词：

D O I：

10.1364/AO.28.003187

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3187 / 3198

页数：12

共 11 条

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AZZAM, RMA ;

BASHARA, NM .

[3]

Azzam RMA., 1999, ELLIPSOMETRY POLARIZ

COHN, RF ;

WAGNER, JW ;

KRUGER, J .

APPLIED OPTICS, 1988, 27 (22) :4664-4671

[5]

COHN RF, 1989, REV PROGR QUANTITATI, V8, P1219

[6]

COHN RF, 1988, NOV P OPTCON 88 SPIE

[7]

FRANKLIN GF, 1980, DIGITAL CONTROL DYNA, P191

[8]

HURD AJ, 1988, BETTER CERAMICS CHEM, V3

[9]

MCCRACKIN FL, 1969, NBS479 TECHN NOT

[10]

MEIKSIN ZH, 1980, ELECTRONIC DESIGN OF