SILICON DIOXIDE FILMS PREPARED BY SPIN-ON SOLUTIONS

被引：18

作者：

KUISL, M

机构：

来源：

THIN SOLID FILMS | 1988年 / 157卷 / 01期

关键词：

D O I：

10.1016/0040-6090(88)90353-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：129 / 134

页数：6

共 15 条

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