MOVPE GROWTH OF SHORT-PERIOD SUPERLATTICES OF ALP-GAP AND ITS APPLICATION FOR LIGHT-EMITTING-DIODES

被引:29
作者
MORII, A
OKAGAWA, H
HARA, K
YOSHINO, J
KUKIMOTO, K
机构
[1] Imaging Science and Engineering Laboratory, Tokyo Institute of Technology, Midori-ku, Yokohama, 227
关键词
D O I
10.1016/0022-0248(92)90550-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Short-period superlattices of AlP-GaP with different periods have been grown by metalorganic vapor phase epitaxy using triethylaluminum, triethylgallium and phosphine as the sources, and they have been characterized by X-ray diffraction and photoluminescence measurements. As a result, it has been found that the samples of the present study are better in heterointerface abruptness than those of the previous study, where trimethylaluminum and trimethylgallium were used as Al and Ga sources. Light-emitting diodes consisting of the AlP-GaP superlattices have been fabricated as an application of this superlattice system.
引用
收藏
页码:772 / 776
页数:5
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