THERMAL-OXIDATION OF COBALT DISILICIDE

被引：16

作者：

BARTUR, M

NICOLET, MA

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1982年 / 29卷 / 02期

关键词：

D O I：

10.1007/BF00632428

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：69 / 70

页数：2

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