THE SURFACE-MORPHOLOGY OF ATOMIC LAYER DEPOSITED MAGNESIA

被引:27
作者
HUANG, R [1 ]
KITAI, AH [1 ]
机构
[1] MCMASTER UNIV,DEPT ENGN PHYS,HAMILTON L8S 4M1,ONTARIO,CANADA
关键词
D O I
10.1007/BF00591603
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:1444 / 1446
页数:3
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