CHARACTERIZATION OF ION-BEAM-SYNTHESIZED BORON-NITRIDE FILMS

被引:7
作者
SINGH, A [1 ]
LESSARD, RA [1 ]
KNYSTAUTAS, EJ [1 ]
机构
[1] UNIV LAVAL,DEPT PHYS,LAB ACCELERATEUR VAN DE GRAAFF,QUEBEC CITY G1K 7P4,QUEBEC,CANADA
来源
MATERIALS SCIENCE AND ENGINEERING | 1987年 / 90卷
关键词
D O I
10.1016/0025-5416(87)90209-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:173 / 176
页数:4
相关论文
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