TIP-INDUCED ANODIZATION OF TITANIUM SURFACES BY SCANNING-TUNNELING-MICROSCOPY - A HUMIDITY EFFECT ON NANOLITHOGRAPHY

被引：108

作者：

SUGIMURA, H

UCHIDA, T

KITAMURA, N

MASUHARA, H

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

[2] ERATO RES DEV CORP JAPAN,MICROPHOTOCONVERS PROJECT,SAKYO KU,KYOTO 606,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 09期

关键词：

D O I：

10.1063/1.110771

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A scanning tunneling microscope was employed for tip-induced anodization of titanium (Ti) surfaces. Spatial resolution of fabricated patterns was remarkably affected by the tip shape and humidity in the atmosphere. The amount of adsorbed water on the Ti surface determined by humidity has a key role in controlling the resolution, and the resolution becomes worse with increasing humidity. Under the optimized conditions, tip-induced anodization of Ti was successfully achieved with a spatial resolution of 30 nm.

引用

页码：1288 / 1290

页数：3

共 7 条

[1] MODIFICATION OF HYDROGEN-PASSIVATED SILICON BY A SCANNING TUNNELING MICROSCOPE OPERATING IN AIR [J].