ELECTRONIC AND OPTICAL EFFECTS OF BORON DOPING BY PLASMA ASSISTED DIFFUSION IN A-SIC-H

被引：1

作者：

MOHRING, HD

SCHUBERT, MB

SCHUMM, G

BAUER, GH

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1987年 / 97-8卷

关键词：

D O I：

10.1016/0022-3093(87)90339-5

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1415 / 1418

页数：4

共 9 条

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[6]

MOHRING HD, 1986, MRS S P, V70, P331

[7] A DOPING-PRECIPITATED MORPHOLOGY IN PLASMA-DEPOSITED A-SI-H [J].

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[8]

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[9]

SCHUBERT MB, 1986, 7TH P EC PHOT SOL EN, P489

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