DETERMINATION OF HYDROGEN CONCENTRATION DEPTH PROFILES IN A-SI-H BY SECONDARY NEUTRAL MASS-SPECTROMETRY (SNMS)

被引：20

作者：

SOPKA, J

OECHSNER, H

机构：

来源：

关键词：

D O I：

10.1016/0022-3093(89)90115-4

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：208 / 210

页数：3

共 5 条

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[2] RECENT APPLICATIONS OF SECONDARY NEUTRAL MASS-SPECTROMETRY FOR QUANTITATIVE-ANALYSIS OF HOMOGENEOUS AND STRUCTURED SAMPLES
OECHSNER, H
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) : 918 - 925
[3] Oechsner H., 1982, SPRINGER SER CHEM PH, V19, P106
[4] RUBEL H, 1986, J VAC SCI TECHNOL A, V4, P1855, DOI 10.1116/1.573777
[5] PLASMA STUDIES ON THE LEYBOLD-HERAEUS INA3 SECONDARY NEUTRAL MASS-SPECTROMETRY SYSTEM
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2293 - 2298