PLASMA ANODIZATION OF SILICON AT ROOM-TEMPERATURE

被引：9

作者：

DIMITRIOU, P

GOURRIER, S

机构：

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1981年 / 16卷 / 08期

关键词：

D O I：

10.1051/rphysap:01981001608041900

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：419 / 424

页数：6

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