DEPTH PROFILING OF MBE GAINAS AND DETECTION OF THE GAINAS-INP INTERFACE USING ANODIC-OXIDATION

被引:6
作者
FISCHER, CW
HSIEH, KH
机构
关键词
D O I
10.1149/1.2108454
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:2483 / 2485
页数:3
相关论文
共 7 条
[1]   AUTOMATIC CARRIER CONCENTRATION PROFILE PLOTTER USING AN ELECTROCHEMICAL TECHNIQUE [J].
AMBRIDGE, T ;
FAKTOR, MM .
JOURNAL OF APPLIED ELECTROCHEMISTRY, 1975, 5 (04) :319-328
[2]   RECENT DEVELOPMENTS IN MOLECULAR-BEAM EPITAXY (MBE) [J].
CHO, AY .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :275-284
[3]  
Chu W. K., 1978, BACKSCATTERING SPECT
[4]   DEPENDENCE OF ELECTRON-MOBILITY ON SPACER THICKNESS AND ELECTRON-DENSITY IN MODULATION-DOPED GA0.47IN0.53AS/AL0.48IN0.52AS HETEROJUNCTIONS [J].
HSIEH, KH ;
OHNO, H ;
WICKS, G ;
EASTMAN, LF .
ELECTRONICS LETTERS, 1983, 19 (05) :160-162
[5]  
LORENZO JP, 1978, J ELCHEM SO, V126, P118
[6]   INVESTIGATION OF CATION-TRANSPORT PROCESSES DURING ANODIC-OXIDATION OF DUPLEX LAYERS OF TANTALUM ON NIOBIUM BY USE OF RUTHERFORD BACKSCATTERING AND NUCLEAR MICROANALYSIS [J].
PERRIERE, J ;
RIGO, S ;
SIEJKA, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (09) :1549-1557
[7]   AUGER ANALYSIS OF ANODIC OXIDE INP INTERFACE [J].
WILMSEN, CW ;
KEE, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (04) :953-956