EFFECT OF ALN BUFFER LAYER ON ALGAN/ALPHA-AL2O3 HETEROEPITAXIAL GROWTH BY METALORGANIC VAPOR-PHASE EPITAXY

被引：93

作者：

KOIDE, Y ^{[1
]}

ITOH, N ^{[1
]}

ITOH, K ^{[1
]}

SAWAKI, N ^{[1
]}

AKASAKI, I ^{[1
]}

机构：

[1] UNIV OSAKA PREFECTURE,COLL ENGN,DEPT ELECTR,SAKAI,OSAKA 591,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 07期

关键词：

D O I：

10.1143/JJAP.27.1156

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1156 / 1161

页数：6

共 15 条

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