CHARACTERISATION OF THIN SURFACE FILMS ON GERMANIUM IN VARIOUS SOLVENTS BY ELLIPSOMETRY

被引：11

作者：

EHMAN, MF

VEDAM, K

WHITE, WB

FAUST, JW

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1971年 / 6卷 / 07期

关键词：

D O I：

10.1007/BF00549947

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：969 / &

共 21 条

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[20] ELLIPSOMETRIC METHOD FOR DETERMINATION OF ALL OPTICAL PARAMETERS OF SYSTEM OF AN ISOTROPIC NONABSORBING FILM ON AN ISOTROPIC ABSORBING SUBSTRATE . OPTICAL CONSTANTS OF SILICON [J].

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