PREPARATION AND CHARACTERIZATION OF DIAMOND FILMS

被引：1

作者：

CHAUDHURI, S

PAL, AK

机构：

[1] Department of Materials Science, Indian Association for the Cultivation of Science, Calcutta

来源：

BULLETIN OF MATERIALS SCIENCE | 1994年 / 17卷 / 06期

关键词：

DIAMOND; CHEMICAL VAPOR DEPOSITION; SPUTTERING; OPTICAL PROPERTY; ELECTRICAL PROPERTY; MICROSTRUCTURAL STUDY;

D O I：

10.1007/BF02757559

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond films were deposited by magnetron sputtering of vitreous carbon disc and also by plasma CVD technique using C2H2+H-2 or CO2+H-2 gas mixtures. The films were characterized by measuring the electrical, optical and microstructural properties. FTIR and Raman studies were carried out to study the effect of sp(2) and sp(3) bonds present in the films. The films had a high mechanical stress which was determined from the broadening of the optical absorption tail in the films.

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页码：811 / 827

页数：17

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