STRUCTURE AND SODIUM MIGRATION IN SILICON NITRIDE FILMS

被引：71

作者：

DALTON, JV

DROBEK, J

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1968年 / 115卷 / 08期

关键词：

D O I：

10.1149/1.2411450

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：865 / +

页数：1

共 21 条

[1] GRAIN-BOUNDARY DIFFUSION OF ZINC IN COPPER MEASURED BY THE ELECTRON-PROBE MICROANALYZER [J].

ACHTER, MR ;

BIRKS, LS ;

BROOKS, EJ .

JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) :1825-1827

[2] GRAIN-BOUNDARY DIFFUSION [J].

AUSTIN, AE ;

RICHARD, NA .

JOURNAL OF APPLIED PHYSICS, 1961, 32 (08) :1462-&

[3]

BIRKS LS, ELECTRON PROBE MICRO, P147

[4] PROPERTIES OF SIXOYNZ FILMS ON SI [J].

BROWN, DM ;

GRAY, PV ;

HEUMANN, FK ;

PHILIPP, HR ;

TAFT, EA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (03) :311-&

[5] STUDIES OF SODIUM IN SIO2 FILMS BY NEUTRON ACTIVATION AND RADIOTRACER TECHNIQUES [J].

BUCK, TM ;

ALLEN, FG ;

DALTON, JV ;

STRUTHERS, JD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (08) :862-+

[6]

CALBICK CJ, 1964, PHYS THIN FILMS, P11

[7]

CARLSON HG, 1966, PHYS FAIL ELECTRON, P390

[8]

CARLSON HG, 1967, PHYS FAIL ELECTRON, P265

[9] PREPARATION AND PROPERTIES OF PYROLYTIC SILICON NITRIDE [J].

DOO, VY ;

NICHOLS, DR ;

SILVEY, GA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (12) :1279-&

[10]

FORGENG WD, 1958, T AM I MIN MET ENG, V212, P343

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