INTERNAL-STRESS MINIMIZATION IN THE FABRICATION OF TRANSMISSIVE MULTILAYER X-RAY OPTICS

被引:22
作者
JANKOWSKI, AF
BIONTA, RM
GABRIELE, PC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期
关键词
D O I
10.1116/1.576120
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:210 / 213
页数:4
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