STM COMBINED WITH SEM WITHOUT SEM CAPABILITY LIMITATIONS

被引:11
作者
GOLUBOK, AO
TIMOFEEV, VA
机构
[1] Institute for Analytical Instrumentation, Russian Academy of Sciences, St. Petersberg, 198103
关键词
D O I
10.1016/0304-3991(92)90483-Z
中图分类号
TH742 [显微镜];
学科分类号
摘要
An advanced originally designed STM unit combined with a high-resolution SEM to obtain simultaneous STM and SEM images has been developed. High-quality STM parameters have been achieved as a result of the compact size of the unit mounted on the SEM goniometer without any additional vibration isolation. The basis of the STM unit is a 3-coordinate piezowalker which provides coarse and fine tip-to-specimen approach and lateral specimen movement in a 1.5 x 1.5 x 2.5 mm3 range at any SEM goniometer position. The shortest specimen-objective lens distance is 4 mm. Some results of simultaneous studies obtained with a Hitachi S-2500 SEM are presented.
引用
收藏
页码:1558 / 1563
页数:6
相关论文
共 8 条
  • [1] SEM STM COMBINATION FOR STM TIP GUIDANCE
    ANDERS, M
    MUCK, M
    HEIDEN, C
    [J]. ULTRAMICROSCOPY, 1988, 25 (02) : 123 - 128
  • [2] SCANNING TUNNELING MICROSCOPE COMBINED WITH A SCANNING ELECTRON-MICROSCOPE
    GERBER, C
    BINNIG, G
    FUCHS, H
    MARTI, O
    ROHRER, H
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (02) : 221 - 224
  • [3] TOPOGRAPHIC IMAGING OF GAAS-MICROSTRUCTURED SAMPLES BY STM AND SEM
    GOMEZRODRIGUEZ, JM
    VAZQUEZ, L
    BARTOLOME, A
    BARO, AM
    GRAMBOW, P
    HEITMANN, D
    [J]. ULTRAMICROSCOPY, 1989, 30 (03) : 355 - 358
  • [4] SCANNING TUNNELING MICROSCOPE COMBINED WITH SCANNING ELECTRON-MICROSCOPE
    ICHINOKAWA, T
    MIYAZAKI, Y
    KOGA, Y
    [J]. ULTRAMICROSCOPY, 1987, 23 (01) : 115 - 118
  • [5] REFLECTION ELECTRON-MICROSCOPE IMAGING OF AN OPERATING SCANNING TUNNELING MICROSCOPE
    KUWABARA, M
    LO, W
    SPENCE, JCH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04): : 2745 - 2751
  • [6] COMBINATION OF A SCANNING TUNNELING MICROSCOPE WITH A SCANNING ELECTRON-MICROSCOPE
    VAZQUEZ, L
    BARTOLOME, A
    GARCIA, R
    BUENDIA, A
    BARO, AM
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (08) : 1286 - 1289
  • [7] VOLODIN AP, 1989, PRIB TEKH EKSP, V5, P185
  • [8] SCANNING TUNNELING AND SCANNING ELECTRON-MICROSCOPY INVESTIGATIONS OF NONUNIFORM SURFACES
    WIESENDANGER, R
    ANSELMETTI, D
    ENG, L
    HEINZELMANN, H
    HIDBER, HR
    ROSENTHALER, L
    STAUFER, U
    GUNTHERODT, HJ
    DUGGELIN, M
    GUGGENHEIM, R
    [J]. ULTRAMICROSCOPY, 1988, 25 (02) : 129 - 133