SPECTROSCOPIC ELLIPSOMETRY MEASUREMENTS OF THE DIAMOND CRYSTALLINE SI INTERFACE IN CHEMICALLY VAPOR-DEPOSITED POLYCRYSTALLINE DIAMOND FILMS

被引：9

作者：

CIFRE, J

CAMPMANY, J

BERTRAN, E

ESTEVE, J

机构：

[1] Department Fisica Aplicada i Electrònica, Universitat de Barcelona, E-08028 Barcelona

来源：

关键词：

D O I：

10.1016/0925-9635(93)90212-K

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Optical characterization of polycrystalline diamond films has been performed by spectroscopic phase-modulated ellipsometry measurements in the UV-visible range. The films were obtained from a gas mixture of methane diluted in hydrogen in a hot-filament chemical vapour deposition system on crystalline silicon wafers previously polished with diamond powder. The ellipsometric measurements were obtained from the structure interface-layer/diamond-film after a chemical etching of the substrate. The back surface of the diamond films exhibits a specular surface with high reflectivity, allowing precise ellipsometric measurements. A two-layer structure is deduced from the ellipsometric data and it is discussed together with the X-ray diffraction results.

引用

页码：728 / 731

页数：4

共 9 条

[1]

AZZAM RMA, 1989, ELLIPSOMETRY POLARIZ, pCH4

[2] Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances [J].