ATOM PROBE STUDIES OF THE COMPOSITION OF LOW-TEMPERATURE OXIDES ON (100) SILICON AND GALLIUM-ARSENIDE SURFACES

被引：11

作者：

GROVENOR, CRM

CEREZO, A

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 12期

关键词：

D O I：

10.1063/1.343185

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5089 / 5095

页数：7

共 34 条

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