EFFECT OF HEAT-TREATMENT ON THE COEFFICIENT BETA-PF FOR THE POOLE-FRENKEL EFFECT AND THE CONDUCTIVITY IN TA2O5 FILMS

被引：23

作者：

MATSUMOTO, H

SUZUKI, A

YABUMOTO, T

机构：

来源：

关键词：

D O I：

10.1143/JJAP.19.71

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：71 / 77

页数：7

共 19 条

[11]

MEAD CA, 1966, BASIC PROBLEMS THIN, P674

[12]

PULFREY DL, 1968, J APPL PHYS, V40, P3891

SIMMONS, JG .

PHYSICAL REVIEW, 1968, 166 (03) :912-&

SIMMONS, JG .

PHYSICAL REVIEW, 1967, 155 (03) :657-&

[15] CONDUCTION IN SILICON OXIDE FILMS [J].

STUART, M .

BRITISH JOURNAL OF APPLIED PHYSICS, 1967, 18 (11) :1637-&

[16] POOLE-FRENKEL WITH COMPENSATION PRESENT [J].

YEARGAN, JR ;

TAYLOR, HL .

YOUNG, PL .

YOUNG, PL ;

FEHLNER, FP ;

WHITMAN, AJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :174-176

YOUNG, PL .