RESISTIVITIES OF THIN-FILM TRANSITION-METAL SILICIDES

[21] X-RAY ANALYSIS OF SPUTTERED FILMS OF BETA-TANTALUM AND BODY-CENTERED CUBIC TANTALUM [J]. THIN SOLID FILMS, 1972, 10 (01) : 123 - &

[22] ROBINS DA, 1958, PHILOS MAG, V4, P322

[23] SARASWAT KC, 1979, IEDM, P462

[24] SHUNK FA, 1969, CONSTITUTION BINA S2

[25] MOS COMPATIBILITY OF HIGH-CONDUCTIVITY TASI2-N+ POLY-SI GATES [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (08) : 1425 - 1430

[26] Tu K. N., 1978, Thin films. Interdiffusion and reactions, P359

[27] DIRECT OBSERVATION OF EPITAXIAL ISLANDS OF PD2SI ON (001) SI [J]. APPLIED PHYSICS LETTERS, 1980, 37 (01) : 51 - 53

[28] Wehrmann R., 1967, HIGH TEMPERATURE MAT, P399

[29] 1979, HDB CHEM PHYSICS

[21] X-RAY ANALYSIS OF SPUTTERED FILMS OF BETA-TANTALUM AND BODY-CENTERED CUBIC TANTALUM [J]. THIN SOLID FILMS, 1972, 10 (01) : 123 - &

[22] ROBINS DA, 1958, PHILOS MAG, V4, P322

[23] SARASWAT KC, 1979, IEDM, P462

[24] SHUNK FA, 1969, CONSTITUTION BINA S2

[25] MOS COMPATIBILITY OF HIGH-CONDUCTIVITY TASI2-N+ POLY-SI GATES [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (08) : 1425 - 1430

[26] Tu K. N., 1978, Thin films. Interdiffusion and reactions, P359

[27] DIRECT OBSERVATION OF EPITAXIAL ISLANDS OF PD2SI ON (001) SI [J]. APPLIED PHYSICS LETTERS, 1980, 37 (01) : 51 - 53

[28] Wehrmann R., 1967, HIGH TEMPERATURE MAT, P399

[29] 1979, HDB CHEM PHYSICS