EFFECTS OF OPTICAL ANISOTROPY OF AGGREGATED SILVER FILMS ON ELLIPSOMETRIC DETERMINATION OF N, K, AND D

被引：27

作者：

YAMAGUCHI, T

YOSHIDA, S

KINBARA, A

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1972年 / 62卷 / 05期

关键词：

D O I：

10.1364/JOSA.62.000634

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：634 / +

页数：1

共 34 条

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[24]

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SCOTT, GD .

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ROWE, EC .

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[28] A THEORETICAL AND EXPERIMENTAL ANALYSIS OF ELLIPSOMETER [J].

SMITH, PH .

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[29]

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[30]

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